Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Patent
1984-04-10
1985-09-17
Griffin, Donald A.
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
73718, H01G 700, H01G 516
Patent
active
045424365
ABSTRACT:
A capacitive pressure transducer of the deflecting diaphragm type is adapted to be coupled to a capacitance transducing circuit and includes a generally planar, electrically conductive base member support upon a first insulative substrate. A sensor member is supported upon a second insulative substrate in a generally parallel, spaced relationship from the base member and coacts with the base member to form a sensor capacitor. A reference member is generally coplanar with and in electrical isolation from the sensor member and coacts with the base member to form a reference capacitor. The sensor and reference members each have a plurality of segments interposed one with another. The sensor and reference capacitors have pressure-dependent capacitance values Cs and Cr respectively such that, for discrete pressures selected within an operative range of pressures, the output signals from the transducing circuit will be substantially linear.
A method for making such a deflecting diaphragm type capacitive pressure transducer is also disclosed.
REFERENCES:
patent: 3858097 (1974-12-01), Polye
patent: 3952234 (1976-04-01), Birchall
patent: 4158217 (1979-06-01), Bell
patent: 4227419 (1980-10-01), Park
patent: 4392383 (1983-07-01), Bauerlen et al.
patent: 4422125 (1983-12-01), Antonazzi et al.
patent: 4458537 (1984-07-01), Bell et al.
Griffin Donald A.
Jochman, Jr. Joseph J.
Johnson Service Company
Ryan John P.
Shupe Larry L.
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