Linear semiconductor processing facilities

Details Linear semiconductor processing facilities Linear semiconductor processing facilities

2011-06-14

2011-06-14

Fox, Charles A (Department: 3652)

Material or article handling

Process

Of moving material between zones having different pressures...

C414S217000, C414S806000

Reexamination Certificate

active

07959403

ABSTRACT:
Methods and systems are provided for handling materials, including materials used in semiconductor manufacturing systems. The methods and systems include linear semiconductor processing facilities for vacuum-based semiconductor processing and handling, as well as linkable or extensible semiconductor processing facilities that can be flexibly configured to meet a variety of constraints.

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