Linear pn junction capacitance diode

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357 51, 357 90, H01L 2992

Patent

active

044751176

ABSTRACT:
A capacitance diode has a substrate of a first conductivity type, an epitaxial layer of the first conductivity type present thereon, a first zone of the first conductivity type diffused therein and a second surface zone of the second opposite conductivity type over said first zone and forming a p-n junction with the first zone. According to the invention, the doping profile in the first zone varies substantially according to the equation N(x)=N.sub.o e.sup.-.beta.x +N.sub.E, where N.sub.o is the doping concentration of the first zone at the p-n junction, N is the doping concentration of the epitaxial layer, and x is the distance from the p-n junction, and where N.sub.o <24 N.sub.E. As a result, a small frequency deviation is obtained, and this frequency deviation does not change sign.

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