Linear motor-driven X-Y table

Details Linear motor-driven X-Y table Linear motor-driven X-Y table

1987-07-13

1988-09-27

Budd, Mark O.

Electricity: motive power systems

Linear-movement motors

310 13, H02K 4102

Patent

active

047744421

ABSTRACT:
A linear motor-driven X-Y table includes a base and an intermediate saddle mounted on the base through linear bearings so as to be linearly reciprocatable in an X-axis direction. A table body is mounted on the intermediate saddle through linear bearings so as to be movable in a Y-axis direction perpendicular to the X-axis direction. A first linear motor is provided between the intermediate saddle and the base so as to be able to move the saddle linearly relative to the base, and a second linear motor is provided between the table body and the intermediate saddle so as to be able to move the table body linearly relative to the saddle.

REFERENCES:
patent: 3716731 (1973-02-01), Nilsson
patent: 3832610 (1974-08-01), Shimizu
patent: 3904900 (1975-09-01), Shichida

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