Linear motor driven vertical lift stage

Details Linear motor driven vertical lift stage Linear motor driven vertical lift stage

1997-02-27

1998-03-24

Stephan, Steven L.

Electrical generator or motor structure

Dynamoelectric

Linear

361144, 359393, 108138, 33568, 7447901, H01L 2168, G03F 900

Patent

active

057316414

ABSTRACT:
A linear motor driven positioning stage comprises a wedge positioned between a carrier and a base and a linear motor positioned between the wedge and the base for moving the wedge relative to the base along a second axis whereby the carrier moves relative to the base along a first axis.

REFERENCES:
patent: 4540277 (1985-09-01), Mayer et al.
patent: 5280677 (1994-01-01), Kubo et al.
patent: 5323712 (1994-06-01), Kikuri

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