Linear motor and exposure apparatus having the same

Details Linear motor and exposure apparatus having the same Linear motor and exposure apparatus having the same

2007-09-18

2007-09-18

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C410S013000, C410S015000

Reexamination Certificate

active

11212652

ABSTRACT:
A linear motor has a multi-phase coil to be energized. The linear motor includes a movable element, a stator, and a control system for controlling the position of the movable element. The control system is arranged to acquire drive information related to the linear motor going to be driven, and to position the stator on the basis of the drive information prior to the driving.

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