Electric heating – Metal heating – By arc
Patent
1995-10-03
1998-03-10
Paschall, Mark H.
Electric heating
Metal heating
By arc
21912142, 219123, 31511141, 20429816, B23K 1000
Patent
active
057264120
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
The present invention relates to a linear microwave source for plasma surface treatment.
PRIOR ART
In electron cyclotron resonance sources, the ions are obtained by ionizing, within a sealed enclosure of the superhigh frequency cavity type and having an axis of symmetry, a gaseous medium constituted by one or more gases or metal vapours. This ionization results from an interaction between the gaseous medium and a plasma of electrons highly accelerated by electron cyclotron resonance. This resonance is obtained by means of the combined action of a high frequency electromagnetic field injected at a first end of the enclosure and a magnetic field having an axial symmetry prevailing in said same enclosure.
French patent application 86 10066 of Jul. 10, 1986 describes such a cyclotron resonance ion source having: second ends oriented in accordance with said axis, said enclosure containing a gas for forming by cyclotron resonance a plasma confined within said enclosure; electromagnetic field; symmetry coinciding with that of the enclosure, producing axial and radial, local magnetic fields, defining at least one equimagnetic layer on which the electron cyclotron resonance condition is satisfied, said magnetic structure comprising: respect to a median plane, perpendicular to the longitudinal axis of the enclosure and passing through the centre of the cavity, said two coils being traversed by currents having opposing flow directions and the median plane and locally reinforcing the radial magnetic fields in said plane; the second end of the enclosure.
Several other prior art documents relate to plasma sources.
Patent application WO-A-92/21136 (Material Research Co.) describes an apparatus for the treatment of electronic "wafers" having the following features: of distributed loops, symmetry of revolution and being highly inhomogeneous, rotate.
Such a source with a revolution geometry cannot be transposed to a linear geometry.
Japanese abstract (Vol. 10, no. 158, 6.6.1986; JP-A-61-013 634) describes a device whose magnetic configuration is of revolution.
The configuration of the cusp is that used in fusion machines. The cusp configuration is used for eliminating in the radial direction high energy particles, which can cause defects in the deposition. In said configuration the cusp is not an active element.
Patent application EP-A-252,845 (CEA) describes an electron cyclotron resonance ion source. This source has an enclosure containing a gas for forming a confined plasma, a device for injecting at one end of the enclosure a hf electromagnetic field, two coils arranged around the enclosure and supplied in opposition, located on either side of a median plane perpendicular to the longitudinal axis of the enclosure, a ring-shaped, soft iron shield surrounding the enclosure and located in the median plane, the coils and the shield defining at least one equimagnetic layer on which the electron cyclotron resonance condition is satisfied, as well as a system for extracting the ions formed and located at the second end of the enclosure.
Several prior art documents deal with couplers:
The article entitled "Lower-hybrid plasma heating via a new launchers--The multijunction grill" by Gormezano et al (Nuclear Fusion, vol. 25, No. 4, 1985, Vienna, Austria, pp. 419-423).
The article entitled: "Coupling of slow waves near the lower hybrid frequency in JET" by Litaudon et al (Nuclear Fusion, vol. 30, no. 3, 1990, Vienna, Austria, pp. 471-484).
The article entitled: "A 4 waveguide multijunction antenna for L. H. H. in PETULA" by N'Guyen et al (Proceedings of the 13th symposium on fusion technology, vol. 1, 24-28 Sep. 1984, Varese Italy, pp. 663-668).
The article entitled: "The 15 Mw microwave generator and launcher of the lower hybrid current drive experiment on JET" by Pain et al (Proceedings of the IEEE 13th symposium on fusion engineering, 2-6 Oct. 1989, vol. 2, Knoxville, USA, pp. 1083-1088).
The article entitled: "First operation of multijunction launcher on JT-60" by Ikeda et al (Proceedings of the 8th topical
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patent: 4876983 (1989-10-01), Fukuda et al.
patent: 5022977 (1991-06-01), Matsuoka et al.
patent: 5198725 (1993-03-01), Chen et al.
patent: 5302266 (1994-04-01), Grabarz et al.
patent: 5399830 (1995-03-01), Maruyama
Gormezano et al., "Lower-Hybrid Plasma Heating Via A New Launcher--The Multijunction Grill," Nuclear Fusion, Vo. 25, No. 4 (1985) pp. 419-423.
The Patent Office Japanese Government, "Patent Abstracts Of Japan," vol.
Jiang et al., "Real Plasma Effects Of Microwave RAdiation Propagating Perpendicular To A Magnetized Plasma," IEEE Nuclear and Plasma Sciences Society, Catalog No. 89CH2760-7 (1989) pp. 145-146.
Briffod Georges
Khoi Nguyen Trong
Commissariat a l''Energie Atomique
Paschall Mark H.
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