Linear induction semiconductor wafer transportation apparatus

Details Linear induction semiconductor wafer transportation apparatus Linear induction semiconductor wafer transportation apparatus

1984-10-09

1986-11-25

Reeves, Robert B.

Material or article handling

Wheeled, load-transporting type vehicles and means for...

Means is confined to one of the vehicles

104282, 104284, 104292, 198619, 318135, B60L 1310

Patent

active

046246177

ABSTRACT:
A semiconductor wafer transportation apparatus includes a car for supporting a semiconductor wafer, a track for guiding the car, and a linear induction motor for levitating and linearly propelling the car along the track. The motor includes a plurality of permanent magnets disposed on the car, a plurality of linearly disposed and selectively energizable electromagnets disposed along the track and circuitry to sequentially energize the electromagnets. Positioning magnets are used to eliminate friction between the car and the track, to control the degree of levitation and to insure precise lateral positioning of the car on the track, and light emitting diodes are used to detect the position of the car on the track.

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"Rail Transit Technology", Progressive Railroading, Oct. 1981, pp. 48-50.

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