Linear electron beam gun evaporator having uniform electron emis

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H01J 37305

Patent

active

041714628

ABSTRACT:
A linear electron beam evaporation source for a high vapor temperature material such as uranium, the source being provided with a filamentary emitter and apparatus for controlling the filament electron emission to maintain an approximately constant current per filament unit length. A control structure is provided and operated to create a space charge in the vicinity of the electron emitting filament such that the current density of the electron beam is controlled by the space charge rather than the local electron emissivity along the length of the filament.

REFERENCES:
patent: 3655903 (1972-04-01), Roman et al.
patent: 3748365 (1973-07-01), Tsujimoto

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