Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1980-04-16
1981-12-15
Weisstuch, Aaron
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
4272481, 4272555, C23C 1500
Patent
active
043058019
ABSTRACT:
A line-of-sight method of depositing a film having substantially 100% of theoretical density on a substrate. A pressure vessel contains a target source having a surface thereof capable of emitting particles therefrom and a substrate with the source surface and the substrate surface positioned such that the source surface is substantially parallel to the direction of the particles impinging upon the substrate surface, the distance between the most remote portion of the substrate surface receiving the particles and the source surface emitting the particles in a direction parallel to the substrate surface being relatively small. The pressure in the vessel is maintained less than about 5 microns to prevent scattering and permit line-of-sight deposition. By this method the angles of incidence of the particles impinging upon the substrate surface are in the range of from about 45.degree. to 90.degree. even when the target surface area is greatly expanded to increase the deposition rate.
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Bayne Michael A.
McClanahan Edwin D.
Patten James W.
Besha Richard G.
Fisher Robert J.
Glenn Hugh W.
The United States of America as represented by the United States
Weisstuch Aaron
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