Line narrowing module, light source of exposure apparatus...

Details Line narrowing module, light source of exposure apparatus... Line narrowing module, light source of exposure apparatus...

2008-09-16

2008-09-16

Harvey, Minsun (Department: 2828)

Coherent light generators

Particular resonant cavity

Specified output coupling device

C372S009000, C372S055000, C372S057000, C372S098000, C372S099000, C372S100000, C372S102000

Reexamination Certificate

active

11445314

ABSTRACT:
A line narrowing module includes an elliptical mirror, a diffraction grating disposed at a first focus of the mirror for separating an incident beam into different lines, and a laser beam dispersion and extraction unit. The laser beam dispersion and extraction unit disperses incident laser over the diffraction grating and selectively extract from the resulting lines a laser beam having a desired narrowed bandwidth. A light source that employs the line narrowing module also includes a laser oscillator for generating the beam, and a light returning unit that returns one fraction of the beam extracted from the laser oscillator back to the laser oscillator. Another fraction of the beam is extracted from the laser oscillator through a front window of the laser oscillator, and undergoes line narrowing in the module. The laser beam having the narrowed bandwidth is immediately output as the exposure light from the module.

REFERENCES:
patent: 5917849 (1999-06-01), Ershov
patent: 6101211 (2000-08-01), Wakabayashi et al.
patent: 6621846 (2003-09-01), Sandstrom et al.
patent: 6717973 (2004-04-01), Basting et al.
patent: 6721340 (2004-04-01), Fomenkov et al.
patent: 6735232 (2004-05-01), Schroeder et al.
patent: 10-1998-703204 (1998-10-01), None

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