Coherent light generators – Particular resonant cavity – Specified cavity component
Patent
1997-09-10
1999-06-29
Bovernick, Rodney
Coherent light generators
Particular resonant cavity
Specified cavity component
H01S 308
Patent
active
059178493
ABSTRACT:
A line narrowing system in which a polarizing beam splitter, a polarization rotator and a reflecting optic are configured to cause light in an expanded beam from a laser gain medium to illuminate a grating at least twice in each pass through the line narrowing system before returning to the gain medium for further amplification. In a preferred embodiment, the grating is an echelle grating arranged in a Littrow configuration.
REFERENCES:
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patent: 5559816 (1996-09-01), Basting et al.
Littman, Michael G. and Metcalf, Harold J., "Spectrally narrow pulsed dye laser without beam expander", Applied Optics, vol. 17, No. 14, Jul. 15, 1978, pp. 2224-2227.
Loree, T. R., Butterfield, K.B. and Barker, D. L., "Spectral tuning of ArF and KrF discharge lasers" Appl. Phys. Lett., 32(3), Feb. 1, 1978, pp. 171-173.
Sengupta, Uday K., "Krypton fluoride excimer laser for advanced microlithography", Optical Engineering, Oct. 1993, vol. 32 No. 10, pp. 2410-2420.
Trebino, Rick, Roller, James P. and Siegman, Anthony E., "A Comparison of the Cassegrain and Other Beam Expanders in High-Power Pulsed Dye Lasers", IEEE Journal of Quantum Electronics, vol. QE-18(8), pp. 1208-1213 (Aug. 1982).
Bovernick Rodney
Cymer Inc.
Ross, Esq. John R.
Wise Robert E.
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