Limited metal reaction for contact cleaning and improved metal-t

Details Limited metal reaction for contact cleaning and improved metal-t Limited metal reaction for contact cleaning and improved metal-t

1994-01-06

1995-04-04

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437202, 437922, H01L 2144

Patent

active

054037786

ABSTRACT:
An antifuse contact (30) cleaning method and the resulting antifuse (10) uses limited-reaction Ti/.alpha.-Si contact cleaning. The method includes the steps of placing a limited-reaction metal such as Ti (22, 24, 34) at the interface of a metal (20)/.alpha.-Si (32)/metal (36) antifuse contact (30). The method is to react the thin reaction metal (22, 24, 34) at a temperature of less than approximately 450.degree. C. to remove the native interface layer of the metal (20)/.alpha.-Si (32)/metal (36) antifuse to, thereby, clean the metal (20)/.alpha.-Si (32)/metal (36) antifuse contact (30).

REFERENCES:
patent: 5166556 (1992-11-01), Hsu et al.
patent: 5242851 (1993-09-01), Choi
patent: 5298784 (1994-03-01), Gambino et al.
patent: 5322812 (1994-06-01), Dixit et al.

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