Lightweight optical mirrors formed in single crystal substrate

Details Lightweight optical mirrors formed in single crystal substrate Lightweight optical mirrors formed in single crystal substrate

2006-12-05

2006-12-05

Robinson, Mark A. (Department: 2872)

Optical: systems and elements

Methods

C359S838000

Reexamination Certificate

active

07145739

ABSTRACT:
This invention is directed to a process for manufacturing a lightweight mirror from a single crystal material, such as single crystal silicon. As a near perfect single crystal material, single crystal silicon has much lower internal stress than a conventional material. This means much less distortion of the optical surface during the light weighting process. After being ground and polished, a single crystal silicon mirror is light weighted by removing material from the back side using ultrasonic machining. After the light weighting process, the single crystal silicon mirror may be used as-is or further figured by conventional polishing or ion milling, depending on the application and the operating wavelength.

REFERENCES:
patent: 3514275 (1970-05-01), Bray
patent: 3713728 (1973-01-01), Austin et al.
patent: 3753322 (1973-08-01), Bordes
patent: 4657358 (1987-04-01), Anthony et al.
patent: 4678293 (1987-07-01), Paseri
patent: 4885055 (1989-12-01), Woodbury et al.
patent: 4989226 (1991-01-01), Woodbury et al.
patent: 5022745 (1991-06-01), Zayhowski et al.
patent: 5230182 (1993-07-01), Daniell et al.
patent: 5505805 (1996-04-01), Papenburg et al.
patent: 5565052 (1996-10-01), Papenburg et al.
patent: 5609511 (1997-03-01), Moriyama et al.
patent: 5719846 (1998-02-01), Matoba et al.
patent: 5882401 (1999-03-01), Maruyama et al.
patent: 6108121 (2000-08-01), Mansell et al.
patent: 6165873 (2000-12-01), Hamada
patent: 6426968 (2002-07-01), Strife et al.
patent: 2001/0028518 (2001-10-01), Kaiser
patent: 2002/0043081 (2002-04-01), Bowden et al.
patent: 05157903 (1993-06-01), None
patent: 8201593 (1996-08-01), None

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