Metal fusion bonding – With means to juxtapose and bond plural workpieces
Reexamination Certificate
2007-12-04
2007-12-04
Stoner, Kiley (Department: 1725)
Metal fusion bonding
With means to juxtapose and bond plural workpieces
C228S004500, C228S047100
Reexamination Certificate
active
11250270
ABSTRACT:
A bondhead assembly having a bond body for mounting a bonding tool, a support structure that is configured to be drivable for moving the bondhead assembly to different locations and flexural elements arranged substantially along at least one plane which couple the bond body to the support structure for flexibly supporting the bond body during movement with respect to the support structure. A motor is coupled to the support structure and it is operative to drive the bond body to move relative to the support structure along an axis extending substantially perpendicular to the at least one plane.
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patent: 6163970 (2000-12-01), Nelle et al.
patent: 6425514 (2002-07-01), Ou et al.
patent: 6474529 (2002-11-01), Yamaguchi et al.
patent: 6813225 (2004-11-01), Widdowson et al.
patent: 2003/0035349 (2003-02-01), Widdowson et al.
patent: 2006/0077399 (2006-04-01), Gaunekar et al.
Gaunekar Ajit
Widdowson Gary Peter
ASM Technology Singapore Pte. Ltd.
Ostrolenk Faber Gerb & Soffen, LLP
Stoner Kiley
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