Lighting optical machine and defect inspection system

Details Lighting optical machine and defect inspection system Lighting optical machine and defect inspection system

2006-11-07

2006-11-07

Stafira, Michael P. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237200

Reexamination Certificate

active

07133127

ABSTRACT:
A lighting optical machine and defect inspection system having high reliability and safety when a laser beam is used as a light source. The lighting optical machine comprises: a housing, which accommodates a laser source, a beam polarization mechanism having first and second plane mirrors enabling a beam emitted from the laser source to be reflected so that the beam travels in the direction almost parallel to the beam emitted from the laser source, a beam expander for converting the beam to a parallel beam having a larger cross-sectional area, an objective lens, through which the parallel beam is reduced and applied to the surface of a sample; a first control mechanism for controlling the directions of the two plane mirrors of the beam polarization mechanism with an electric signal; and a second control mechanism for controlling the focus position of the beam expander with an electric signal.

REFERENCES:
patent: 6490047 (2002-12-01), Siu
patent: 6512843 (2003-01-01), Kuwabara
patent: 6831737 (2004-12-01), Uto et al.
patent: 2003/0020904 (2003-01-01), Uto et al.
patent: 05-289116 (1993-11-01), None
patent: 08-035937 (1996-02-01), None
patent: 08-184407 (1996-07-01), None
patent: 09-005251 (1997-01-01), None
patent: 2000-131240 (2000-05-01), None
patent: 2001-141428 (2001-05-01), None
patent: 2002-022415 (2002-01-01), None
patent: 2002-39959 (2002-02-01), None
patent: 2002-116361 (2002-04-01), None

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