Lighting optical device, exposure system, and exposure method

Details Lighting optical device, exposure system, and exposure method Lighting optical device, exposure system, and exposure method

2011-08-23

2011-08-23

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S067000

Reexamination Certificate

active

08004658

ABSTRACT:
An illumination optical apparatus is able to accomplish desired annular illumination, circular illumination, and so on, without substantial influence of the zero-order light from a diffractive optical element. The illumination optical apparatus comprises a diffractive optical element (3) which converts a light beam from a light source (1) into a light beam with a predetermined light intensity distribution; an optical integrator (8) disposed between the diffractive optical element and a surface to be illuminated (M) and adapted for forming a substantial surface illuminant on an illumination pupil plane on the basis of the light beam from the diffractive optical element; a shaping optical system (4, 6, 7) disposed between the diffractive optical element and the optical integrator and adapted for changing a size and shape of the substantial surface illuminant; and a preventing device disposed at a position substantially in the relation of Fourier transform with the diffractive optical element in an optical path of the shaping optical system, and adapted for preventing the zero-order light from the diffractive optical element from traveling along an illumination light path.

REFERENCES:
patent: 5329333 (1994-07-01), Noguchi et al.
patent: 5526094 (1996-06-01), Noguchi et al.
patent: 5767949 (1998-06-01), Noguchi et al.
patent: 6016187 (2000-01-01), Noguchi et al.
patent: 6285443 (2001-09-01), Wangler et al.
patent: 6335146 (2002-01-01), Noguchi et al.
patent: 6485891 (2002-11-01), Noguchi et al.
patent: 6563567 (2003-05-01), Komatsuda et al.
patent: 6741394 (2004-05-01), Tanitsu et al.
patent: 2001/0043318 (2001-11-01), Mori
patent: 2003/0073045 (2003-04-01), Noguchi et al.
patent: 2003/0156266 (2003-08-01), Tanitsu
patent: 2003/0156269 (2003-08-01), Komatsuda et al.
patent: 2003/0160949 (2003-08-01), Komatsuda et al.
patent: 2004/0125459 (2004-07-01), Tanitsu et al.
patent: 2006/0039072 (2006-02-01), Ruoff et al.
patent: 43 01 574 (1994-07-01), None
patent: 0 967 524 (1999-12-01), None
patent: 1 434 092 (2004-06-01), None
patent: A 05-160002 (1993-06-01), None
patent: A 06-124873 (1994-05-01), None
patent: A 08-203801 (1996-08-01), None
patent: A 10-303114 (1998-11-01), None
patent: A 2001-176766 (2001-06-01), None
patent: A 2001-284240 (2001-10-01), None
patent: A 2001-338861 (2001-12-01), None
patent: A 2002-158157 (2002-05-01), None
patent: A 2005-243904 (2005-09-01), None
patent: WO 99/49504 (1999-09-01), None
patent: WO 2005071474 (2005-08-01), None
patent: WO 2006/021540 (2006-03-01), None
May 9, 2011 Office Action issued in European Patent Application No. 05793150.3.

Affiliated with

Also associated with

Rating

Lighting optical device, exposure system, and exposure method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lighting optical device, exposure system, and exposure method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lighting optical device, exposure system, and exposure method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2672314