Lighting optical apparatus and sample inspection apparatus

Details Lighting optical apparatus and sample inspection apparatus Lighting optical apparatus and sample inspection apparatus

2011-01-04

2011-01-04

Berman, Jack I (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S492100, C362S268000, C362S331000, C359S362000, C359S368000, C359S385000, C359S710000

Reexamination Certificate

active

07863588

ABSTRACT:
A lighting optical apparatus using a deep ultraviolet light source that are easy to adjust due to a configuration with fewer components, has high illuminant and illuminant uniformity on an irradiated surface are provided. The apparatus has a deep ultraviolet light source from which deep ultraviolet rays are emitted, a first double-sided cylindrical lens which has a cylindrical lens array on both sides with a configuration of cylinder axes intersecting at right angles, a second double-sided cylindrical lens which has a cylindrical lens array on both sides with a configuration of cylinder axes intersecting at right angles, and a condenser lens.

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