Lighting assembly, exposure apparatus and exposure method employ

Details Lighting assembly, exposure apparatus and exposure method employ Lighting assembly, exposure apparatus and exposure method employ

1996-03-08

1998-05-05

Pendegrass, Joan H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, G03F 720

Patent

active

057482888

ABSTRACT:
The present invention provides spot-illumination of a specific size having sufficiently homogeneous light intensity distribution, with a small and inexpensive apparatus. A lighting assembly condenses the light from light source 1 with condensing-reflecting member 2. An optical integrator 3 receives at its one end the light via condensing-reflecting member 2 and emits from the other end after making the light intensity distribution homogeneous A projection lens system 4 projects the emitting surface of optical integrator 3 onto an emitted surface. By shifting the relative positioning between the lighting assembly and the substrate 11, and adjusting the distance between the substrate 11 and the mask 12, which stores a pattern to be formed, a specified area of the exposure surface 11a is scanned and exposed to have a mask pattern transcribed on the exposure surface 11a.

REFERENCES:
patent: 4425038 (1984-01-01), La Fiandra et al.
patent: 4737824 (1988-04-01), Sakai et al.
patent: 4788577 (1988-11-01), Akiyama et al.
patent: 5359388 (1994-10-01), Hollman

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