Lighted cassette alignment fixture

Details Lighted cassette alignment fixture Lighted cassette alignment fixture

2005-01-25

2005-01-25

Ward, John Anthony (Department: 2875)

Illumination

Combined

C362S154000

Reexamination Certificate

active

06846095

ABSTRACT:
Disclosed is a lighted wafer cassette for use in semiconductor wafer processing. Also disclosed are systems and methods employing a wafer cassette lighted with one or more affixed light sources for facilitating cassette alignment with standard semiconductor processing apparatus.

REFERENCES:
patent: 5933521 (1999-08-01), Pasic
patent: 6188185 (2001-02-01), Ter-Hovhannisian et al.
patent: 6578979 (2003-06-01), Truttmann-Battig

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