Light valve target comprising electrostatically-repelled micro-m

Details Light valve target comprising electrostatically-repelled micro-m Light valve target comprising electrostatically-repelled micro-m

1997-04-18

1998-06-16

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359290, 359291, 359295, 359846, 348770, 348771, G02B 2600

Patent

active

057680094

ABSTRACT:
A high intensity image projection system includes a micro-mirror light valve target with micro-mirror elements repulsively pivotally-actuable. Each micro-mirror of the target array comprises a fixed base electrode joined to an overlying micro-mirror element by means of a hinge with each element formed of conductive material. As such, in operation, charge deposited upon either the base electrode or the micro-mirror element is free to migrate, in response to repulsive forces between deposited charges, to the element spaced therefrom. The resulting presence of like charge distributions upon the base electrode and micro-mirror element of a micro-mirror produces a repulsive electrostatic force for pivotally deflecting the micro-mirror element by an amount proportional to the charge deposited thereon. Capacitive charge storage elements and resistive paths are provided for storing and draining the deposited charge between applications of video frame information. In one embodiment, an array of micro-mirror light valves is formed directly upon the face plate of a vidicon tube. In another, a foil is formed that is mounted within the tube by a surrounding clip. In a third embodiment, charge is delivered through a matrix of transistors.

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