Light valve target comprising electrostatically-repelled micro-m

Details Light valve target comprising electrostatically-repelled micro-m Light valve target comprising electrostatically-repelled micro-m

1998-04-29

1999-07-20

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359290, 359291, 359846, 359298, 348770, 348771, G02B 2600

Patent

active

059263091

ABSTRACT:
A high intensity light modulator includes a micro-mirror light valve target with electrostatically-repelled micro-mirror elements. Each micro-mirror of the target array comprises a base electrode and an overlying micro-mirror element. In operation, charge is deposited upon the micro-mirrors to produce repulsive electrostatic forces that outwardly deflect the micro-mirror elements by an amount proportional to the deposited charge. In one embodiment, an array of micro-mirror light valves is formed directly upon the face plate of a vidicon tube and is addressed using a scanning electron gun.

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R.N. Thomas, et al., "The Mirror-Matrix Tube: A Novel Light Valve for Projection Displays", IEEE Transactions on Electron Devices, vol. ED-22 #9, Sep. 1995, p. 765.

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