Light source unit, exposure apparatus, and device...

Details Light source unit, exposure apparatus, and device... Light source unit, exposure apparatus, and device...

2007-01-30

2007-01-30

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S067000, C355S071000

Reexamination Certificate

active

11016875

ABSTRACT:
A light source unit including a condensing mirror for collecting EUV light emitted from a light emission point, a debris reducing member for reducing debris, produced from the light emission point or from a portion around the light emission point, and to be deposited on the condensing mirror, and a base member arranged so that the condensing mirror and the debris reducing member are mounted thereon.

REFERENCES:
patent: 5600698 (1997-02-01), Terashima et al.
patent: 6463119 (2002-10-01), Terashima et al.
patent: 6594334 (2003-07-01), Ota
patent: 6963071 (2005-11-01), Bristol
patent: 2005/0057738 (2005-03-01), Tsuji
patent: 2000-349009 (2000-12-01), None

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