Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-07-30
2009-12-01
Nguyen, Kiet T (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
Reexamination Certificate
active
07626188
ABSTRACT:
Electrode ablation is controlled in EUV light source device that gasifies a raw material by irradiation with an energy beam and produces a high-temperature plasma using electrodes a raw material for plasma is dripped in a space in the vicinity of, but other than, the discharge region and from which the gasified raw material can reach the discharge region between the discharge electrodes and a laser beam irradiates the high-temperature plasma raw material. A gasified high-temperature plasma raw material, gasified by the laser beam, spreads in the direction of the discharge region. At this time, power is applied on a pair of discharge electrodes, the gasified high-temperature plasma raw material is heated and excited to become a high-temperature plasma, and EUV radiation is emitted. This EUV radiation is collected by an EUV collector mirror and sent to lithography equipment.
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Present Status and Future of EUV (Extreme Ultra Violet) Light Source Research; J. Plasma Fusion Res., vol. 79, No. 3 (2003); pp. 219-220; English Abstracts and Figure Captions.
European Patent Office Search Report, Application No. EP 07 01 4791, May 11, 2007.
Bessho Kazunori
Sato Hiroto
Shirai Takahiro
Teramoto Yusuke
Nguyen Kiet T
Roberts Mlotkowski Safran & Cole P.C.
Safran David S.
Ushiodenki Kabushiki Kaisha
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