Light source device and exposure equipment using the same

Details Light source device and exposure equipment using the same Light source device and exposure equipment using the same

2006-01-17

2006-01-17

Lee, John R. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S42300F, C250S424000, C250S425000

Reexamination Certificate

active

06987279

ABSTRACT:
A light source device capable of extending the life of a collector mirror and reducing running cost by protecting the collector mirror from debris that is considered harmful to a mirror coating while securing the collection solid angle and collection rate of EUV light. The light source device includes a target supply unit for supplying a material to become the target; a laser unit for generating plasma by applying a laser beam to the target; a collection optical system for collecting the extreme ultra violet light radiating from the plasma and emitting the extreme ultra violet light; and magnetic field generating unit for generating a magnetic field within the collection optical system when supplied with current so as to trap charged particles radiating from the plasma.

REFERENCES:
patent: 2004/0071267 (2004-04-01), Jacob et al.
patent: 2004/0108473 (2004-06-01), Melnychuk et al.
patent: 2004/0160155 (2004-08-01), Partlo et al.
patent: 2005/0016679 (2005-01-01), Ruzic et al.
patent: 2005/0155624 (2005-07-01), Lee et al.
patent: 2005/0167618 (2005-08-01), Hoshino et al.
patent: 2552433 (1996-08-01), None
patent: 3433151 (2003-05-01), None

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