Light source device and exposure equipment using the same

Details Light source device and exposure equipment using the same Light source device and exposure equipment using the same

2006-07-18

2006-07-18

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S493100, C378S119000

Reexamination Certificate

active

07078717

ABSTRACT:
A light source device which has small etendue so that high power can be drawn out and which is subject to less damage by debris. The light source device for generating extreme ultra violet light by irradiating a target with a laser beam, includes a target supply unit for supplying a material which becomes the target; a laser unit including an oscillation stage laser having a lower-order transverse mode and at least one amplification stage laser for amplifying a lower-order transverse mode laser beam generated by the oscillation stage laser, for irradiating the target with the amplified laser beam to generate plasma; and a collection optical system for collecting the extreme ultra violet light emitted from the plasma to output the collected extreme ultra violet light.

REFERENCES:
patent: 5577092 (1996-11-01), Kublak et al.
patent: 5991360 (1999-11-01), Matsui et al.
patent: 6862339 (2005-03-01), Richardson
patent: 6882704 (2005-04-01), Schriever et al.
patent: 2004/0238762 (2004-12-01), Mizoguchi et al.
patent: 2003-092199 (2003-03-01), None
Handbook of Laser, Chapter 34, pp. 669-672; Laser Society of Japan, 1982, Ohm Press, Tokyo, Japan & partial translation.

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