Light-sensitive quinone diazide compound containing an alkylimid

Details Light-sensitive quinone diazide compound containing an alkylimid Light-sensitive quinone diazide compound containing an alkylimid

1989-11-30

1992-03-24

Bowers, Jr., Charles L.

Organic compounds -- part of the class 532-570 series

Organic compounds

Diazooxide or diazotate

430166, 430192, 430193, 430326, 534560, 534556, G03F 7022, C07C24500

Patent

active

050990071

ABSTRACT:
A light-sensitive compound is described, containing a quinonediazido group and an alkylimidazole group in the same molecule and which is solubilizable in an aqueous alkali solution upon irradiation with light, and a method of forming a photoresist using the light-sensitive compound. The compound is useful, for example, in production of print substrates and in chemical milling.

REFERENCES:
patent: 2907655 (1959-10-01), Schmidt et al.
patent: 3592646 (1971-07-01), Holstead et al.
patent: 3956262 (1976-05-01), Heyes et al.
patent: 4467025 (1984-08-01), Goto et al.
patent: 4555469 (1985-11-01), Erdmann et al.
patent: 4904564 (1990-02-01), Chiong

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