Optical waveguides – Planar optical waveguide
Reexamination Certificate
2007-07-31
2007-07-31
Connelly-Cushwa, Michelle (Department: 2874)
Optical waveguides
Planar optical waveguide
C385S131000
Reexamination Certificate
active
11183064
ABSTRACT:
In a standard CMOS process, a layer of metallic salicide can be deposited on those selected portions of an integrated circuit, where it is desired to have metallic contacts for electronic components, such as transistors. The deposition of a salicide into optical elements such as the core of an optical waveguide or a light scatterer will damage the elements and prevent the passage of light through those sections of the elements. Prior to the deposition of the salicide, a salicide blocking layer is deposited on those parts of an integrated circuit, such as on an optical waveguide or a light scatterer, which are to be protected from damage by the deposition of salicide. The salicide blocking layer is used as one layer of the cladding of a silicon waveguide and a light scatterer.
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Gunn III Lawrence C.
Pinguet Thierry J.
Rattier Maxime Jean
Connelly-Cushwa Michelle
Fernandez & Associates LLP
Luxtera Inc.
Prince Kajli
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