Light scanning apparatus for detecting foreign particles on surf

Details Light scanning apparatus for detecting foreign particles on surf Light scanning apparatus for detecting foreign particles on surf

1993-06-15

1994-11-08

McGraw, Vincent P.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

250563, 250572, G01N 2188

Patent

active

053631870

ABSTRACT:
A foreign particle detecting apparatus comprises a light source for radiating coherent light onto an object to be detected on a surface of which a circuit pattern is formed, a focusing device for focusing the light emitted from the light source onto the object to be detected at a predetermined angular aperture, a device for moving the incident light focused at the predetermined angular aperture relative to the object to be detected, and a detector for receiving scattered light produced upon incidence of the focused light onto the object to be detected, and which detects foreign matter on the object to be detected on the basis of an output signal from the detector. Foreign matter is discriminated from the circuit pattern on the basis of the output signal from the detector means. The detector comprises at least two light-receiving elements, separated by a spatial angle substantially equal to or slightly larger than the angular aperture of the incident light, for individually outputting signals.

REFERENCES:
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patent: 4889998 (1989-12-01), Hayano et al.
patent: 4943734 (1990-07-01), Johnson et al.
patent: 4952058 (1990-08-01), Noguchi et al.
Patent Abstracts of Japan, vol. 13, No. 572 (P-978) (3920) 18 Dec. 1989.
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Patent Abstracts of Japan, vol. 11, No. 66 (P-552) (2513) 27 Feb. 1987.
Patent Abstracts of Japan, vol. 9, No. 321 (E-367) 17 Dec. 1985.

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