Light-receiving semiconductor device with plural buried layers

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation

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Details

257446, 257465, 257464, 257443, H01L 2714, H01L 3100

Patent

active

054669626

ABSTRACT:
A light-receiving semiconductor device with improved light sensitivity. On a semiconductor substrate of a first conductivity type is formed a plurality of buried layers of a second conductivity type divided by a narrow dividing region. A surface semiconductor layer of the first conductivity type covers the buried layers and the substrate. A connecting semiconductor region of the second conductivity type extends from each of the plurality of the buried layers to the surface of the surface semiconductor layer. An anti-light-reflecting film formed on the surface of the surface semiconductor layer covers a region above the dividing region as well as above the plurality of buried layers. Each of the plurality of buried layers forms a light responsive element with the substrate.

REFERENCES:
patent: 4238760 (1980-12-01), Carr
patent: 4366377 (1982-12-01), Notthoff et al.
patent: 5162887 (1992-11-01), Dierschke
patent: 5177581 (1993-01-01), Kubo et al.

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