Light receiving member having a surface protective layer with a

Details Light receiving member having a surface protective layer with a Light receiving member having a surface protective layer with a

1997-01-21

1998-12-15

Goodrow, John

Radiation imagery chemistry: process, composition, or product th

Electric or magnetic imagery, e.g., xerography,...

Radiation-sensitive composition or product

430128, 430133, G03G 5082

Patent

active

058494464

ABSTRACT:
A light receiving member comprising a electrically conductive substrate, a photoconductive layer composed of a non-single crystalline material containing at least silicon atoms as a matrix formed on said substrate by decomposing a silicon-containing raw material gas, and a surface protective layer composed of a non-single crystalline carbon material containing hydrogen formed on said photoconductive layer by decomposing a raw material gas comprising at least a hydrocarbon using a high frequency power with an oscillation frequency of 50 MHz to 450 MHz, wherein a 20 .ANG. or more thick surface side layer region of said surface protective layer composed of said non-single crystalline carbon material is etched at an etching speed of 0.1 to 50 .ANG./sec. by means of a fluorine-containing plasma produced by decomposing a fluorine-containing gas using a high frequency power with an oscillation frequency of 50 MHz to 450 MHz such that said surface protective layer has a thickness of 100 to 10000 .ANG. and has an etched surface deposited with fluorine atoms so as to cover said etched surface. And a process for producing said light receiving member.

REFERENCES:
patent: 4664999 (1987-05-01), Kakinuma et al.
patent: 4675265 (1987-06-01), Kazama et al.
patent: 5392098 (1995-02-01), Ehara et al.
patent: 5582944 (1996-12-01), Yamamura et al.
patent: 5582947 (1996-12-01), Shirai et al.
patent: 5647953 (1997-07-01), Williams et al.

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