Light receiving apparatus, mark detecting apparatus using...

Details Light receiving apparatus, mark detecting apparatus using... Light receiving apparatus, mark detecting apparatus using...

2006-04-25

2006-04-25

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

Reexamination Certificate

active

07034921

ABSTRACT:
An exposing apparatus for projecting a pattern on an original plate stage onto a substrate of a substrate stage via a projection lens. The apparatus includes a mark detecting apparatus for detecting one or both of a positioning mark on the original plate stage and a positioning mark on the substrate stage. The mark detecting apparatus includes a device for making uniform pulse light emitted from a pulse light emitting apparatus by an oscillating device, receiving the light by a storage-type position sensor and obtaining a pulse light emitting frequency of the pulse light emitting apparatus from a cycle of the oscillating device and a predetermined number of pulses of the pulse light emitting apparatus by the obtained pulse light emitting frequency. A mark on a substrate is irradiated with the pulse light which is made uniform by the oscillating device and output by the pulse light emitting apparatus, and reflected light from the mark is received by the storage-type position sensor to detect the mark.

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