Light radiation apparatus

Details Light radiation apparatus Light radiation apparatus

1987-09-02

1989-08-22

Walberg, Teresa J.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219405, H05B 362

Patent

active

048598321

ABSTRACT:
An apparatus for annealing a substrate includes a plurality of annular light sources concentric about a predetermined axis, a holder for placing the substrate such that the substrate receives radiation from the plurality of annular light sources and is substantially perpendicular to the predetermined axis, and a measuring device having a measuring optical system with an optical axis substantially aligned with the predetermined axis. The measuring device is adapted to receive radiation through the measuring optical system from the substrate placed on the holder and to detect a temperature distribution of the substrate.

REFERENCES:
patent: 3075064 (1963-01-01), Bondonio
patent: 3862397 (1975-01-01), Anderson
patent: 4041278 (1977-08-01), Boah
patent: 4493977 (1985-01-01), Arai

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