Light quantity measuring system and exposure apparatus using the

Details Light quantity measuring system and exposure apparatus using the Light quantity measuring system and exposure apparatus using the

1996-07-10

1999-09-07

Le, N.

Incremental printing of symbolic information

Light or beam marking apparatus or processes

Scan of light

B41J 247

Patent

active

059494689

ABSTRACT:
A light quantity measuring system and an exposure apparatus using the same, wherein the measuring system includes a light intensity measuring device having a plurality of light receiving elements arrayed at least along a scan direction, a scanning mechanism for scanningly moving the light intensity measuring device relative to a particular region to be examined, and a storing device for storing an intensity of light of each light receiving element, as successively received by the light receiving elements as the light intensity measuring device is scanningly moved relative to the particular region. The light quantity is measured on the basis of information stored in the storing device.

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