Light quantity distribution control element and optical...

Details Light quantity distribution control element and optical... Light quantity distribution control element and optical...

2007-07-03

2007-07-03

Assaf, Fayez G. (Department: 2872)

Optical: systems and elements

Diffraction

From grating

C359S575000

Reexamination Certificate

active

10973616

ABSTRACT:
A light quantity distribution control element includes a substrate of 20 mm×20 mm×3 mm made of a material that transmits light, such as optical glass or acryl, and a antireflective structure provided on a surface of the substrate. As the antireflective structure, a conical antireflective structure of a pitch of 0.15 μm (periodic structure having conical convexities) is formed. This corresponds to a antireflective structure having a pitch of a wavelength or less in the ultraviolet band (150 nm to 400 nm) at the time when ultraviolet light is used as incident light.

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