Light phase difference measuring method using an interferometer

Optics: measuring and testing – By polarized light examination – With birefringent element

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356345, G01B 902

Patent

active

052393640

ABSTRACT:
A light phase difference measuring method including: a step of splitting a coherent light beam into two light beams; a step of allowing one of the two light beams to be transmitted or reflected through or on a sample to be measured; a step of producing interference fringes having a high spatial frequency by inclining the other light beam relative to the optical path for incidence thereof so as to overlap these two light beams with each other; a step for detecting locations of points having locally maximum lightness and points having locally minimum lightness on the interference fringes; and a step for measuring locations of the points having locally maximum lightness and the points having locally minimum lightness or a spatial frequency for determining a phase difference between the two light beams. This measuring method makes it possible to always input correct data into a processing circuit.

REFERENCES:
patent: 4169980 (1979-10-01), Zanoni
patent: 4630926 (1986-12-01), Tanaka et al.
Subfringe Interferometry Fundamentals (Optics 13 (1984 55) pp. 55-65.

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