Light ozone asher, light ashing method, and manufacturing method

Details Light ozone asher, light ashing method, and manufacturing method Light ozone asher, light ashing method, and manufacturing method

1995-03-01

1996-08-20

Jordan, Charles T.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

With means applying electromagnetic wave energy or...

422906, 156345, 1566431, 118723R, 20419232, 20419233, 216 63, C23C 1600, H01L 21302

Patent

active

055476422

ABSTRACT:
A light/ozone asher includes a process chamber having a sample stage for supporting a sample processed with active oxygen generated by irradiating ozone with UV rays while not irradiating the sample with UV rays. Since the sample is not irradiated with UV rays when an organic substance on the sample surface is removed, an organic substance (scum) left by removal of parts of the organic substance on the sample is removed without destroying the remaining pattern of organic substance.

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patent: 5350454 (1994-09-01), Ohkawa
patent: 5350480 (1994-09-01), Gray
patent: 5380503 (1995-01-01), Fojii et al.
patent: 5478401 (1995-12-01), Tsunekawa et al.
WPI Abstract Accession No. 94-246344/30 & JP 06/181200A (1994) (Babcock-Hitachi) Jun. 28, 1994.
WPI Abstract Accession No. 89-31425 1/43 & JP 01/233728A (1989) (Hitachi).
"Light Ashing Technique", Semicon News, 1988, Number 12, pp. 47-53.
"UV Light Source And The Application", Open Meeting, 1989, pp. 1-9.

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