Light modulator assembly

Details Light modulator assembly Light modulator assembly

2006-10-24

2006-10-24

Lester, Evelyn A. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S292000, C359S293000, C359S294000, C359S295000, C359S298000, C359S302000, C359S303000, C359S318000, C359S223100, C359S224200, C359S279000, C359S245000, C359S247000, C250S370150, C257S431000, C257S443000, C349S161000, C062S003700

Reexamination Certificate

active

07126741

ABSTRACT:
A light modulator assembly includes a substrate, a micro-electro mechanical semiconductor device (MEMS device) formed on the substrate, and a temperature control device coupled to the substrate and configured to maintain the MEMS device at or above an elevated threshold temperature.

REFERENCES:
patent: 6430934 (2002-08-01), Evans et al.
patent: 6639743 (2003-10-01), Watanabe
patent: 6644820 (2003-11-01), Orcutt
patent: 6726331 (2004-04-01), Miyata
patent: 6963440 (2005-11-01), Martin et al.
patent: 2004/0125431 (2004-07-01), Mehrl
patent: 2004/0251539 (2004-12-01), Faris et al.

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