Light modulator and method of manufacturing the same

Details Light modulator and method of manufacturing the same Light modulator and method of manufacturing the same

2005-05-10

2005-05-10

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S292000, C359S295000, C359S290000, C359S298000

Reexamination Certificate

active

06891654

ABSTRACT:
A method of manufacturing a light modulator in which micromirrors are tilted by an electrostatic force generated by an electrical potential difference between drive electrodes and the micromirrors. The method includes integrally forming support sections disposed at fulcrum points for tilting the micromirrors and axis portions forming axes for tilting the micromirrors.

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