Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2000-12-01
2003-01-28
Mack, Ricky (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S291000
Reexamination Certificate
active
06512625
ABSTRACT:
BACKGROUND
The present invention relates generally to optical devices and optical systems, and more particularly to a device for modulating a light beam intensity and a projector/exposure system using such a device.
Devices which modulate an aspect of a light beam, e.g. an amplitude or phase of the light, find a number of applications. In optical modulation applications, phase modulation is often more important than amplitude modulation. Furthermore, phase modulation devices can often perform amplitude modulation, thereby providing application flexibility. It is desired to provide a light modulation device that is fast, reliable, durable, efficient, and can be used in simple as well as complex applications.
SUMMARY
A technical advance is provided by a new and unique light element. In one embodiment, the light element includes three electrodes, a support structure, a flexible member, and a mirror. The flexible member is connected to the support structure so that it is responsive to electrostatic forces provided by one or more of the three electrodes. The flexible member is positioned in a gap so that it can move between a first and second state, responsive to the electrostatic forces. The mirror is also attached to the flexible member, so that it too moves between a first and second state.
In another embodiment, the light element includes first, second, and third electrodes positioned adjacent to a substrate, each electrode capable of producing a force. Two support members are also connected to the substrate and a flexible member spans there between, extending over and above the three electrodes and capable of moving between a first and second state. As in the previous embodiment, a mirror is connected to and extends above the flexible member.
In another embodiment, the light element includes a first, second, and third electrode for producing a first, second and third force, respectively. A flexible member, which is responsive to a force, is connected to a support structure. A mirror is further attached to the flexible member. In operation, the flexible member, and hence the mirror, transition between different states responsive to various combinations of the first, second, and third forces.
In yet another embodiment, the light element includes two electrodes connected to the substrate for producing an electrostatic force and a flexible member suspended over the two electrodes. An actuator and a third electrode are also included, the actuator being adjacent the flexible member. The first two electrodes are situated to hold the flexible member in a prior state responsive to a hold voltage applied thereto, and the actuator is situated to selectively move the flexible member between two operational states.
REFERENCES:
patent: 3534467 (1970-10-01), Sachs et al.
patent: 4126812 (1978-11-01), Wakefield
patent: 4744047 (1988-05-01), Okamoto et al.
patent: 4786149 (1988-11-01), Hoenig et al.
patent: 4879466 (1989-11-01), Kitaguchi et al.
patent: 5049901 (1991-09-01), Gelbart
patent: 5079544 (1992-01-01), DeMond et al.
patent: 5082755 (1992-01-01), Liu
patent: 5106455 (1992-04-01), Jacobsen et al.
patent: 5109290 (1992-04-01), Imai
patent: 5121983 (1992-06-01), Lee
patent: 5131976 (1992-07-01), Hoko
patent: 5132723 (1992-07-01), Gelbart
patent: 5138368 (1992-08-01), Kahn et al.
patent: 5208818 (1993-05-01), Gelbart et al.
patent: 5269882 (1993-12-01), Jacobsen
patent: 5281996 (1994-01-01), Bruning et al.
patent: 5300966 (1994-04-01), Uehira et al.
patent: 5361272 (1994-11-01), Gorelik
patent: 5416729 (1995-05-01), Leon et al.
patent: 5431127 (1995-07-01), Stevens et al.
patent: 5461455 (1995-10-01), Coteus et al.
patent: 5691541 (1997-11-01), Ceglio et al.
patent: 5771116 (1998-06-01), Miller et al.
patent: 5793473 (1998-08-01), Koyama et al.
patent: 5818498 (1998-10-01), Richardson et al.
patent: 5850310 (1998-12-01), Schweizer
patent: 5870176 (1999-02-01), Sweatt et al.
patent: 5892231 (1999-04-01), Baylor et al.
patent: 5900637 (1999-05-01), Smith
patent: 5905545 (1999-05-01), Poradish et al.
patent: 5909658 (1999-06-01), Clarke et al.
patent: 5936760 (1999-08-01), Choi et al.
patent: 5949557 (1999-09-01), Powell
patent: 5955776 (1999-09-01), Ishikawa
patent: 5956005 (1999-09-01), Sheridon
patent: 5995129 (1999-11-01), Sunagawa et al.
patent: 5995475 (1999-11-01), Gelbart
patent: 5998069 (1999-12-01), Cutter et al.
patent: 6014203 (2000-01-01), Ohkawa
patent: 6048011 (2000-04-01), Fruhling et al.
patent: 6052517 (2000-04-01), Matsunaga et al.
patent: 6061118 (2000-05-01), Takeda
patent: 6071315 (2000-06-01), Ramamurthi et al.
patent: 6072518 (2000-06-01), Gelbart
patent: 6084656 (2000-07-01), Choi et al.
patent: 6107011 (2000-08-01), Gelbart
patent: 6124876 (2000-09-01), Sunagawa
patent: 6133986 (2000-10-01), Johnson
patent: 6205364 (2001-03-01), Lichtenstein et al.
patent: 6238852 (2001-05-01), Klosner
patent: 6251550 (2001-06-01), Ishikawa
patent: 6252717 (2001-06-01), Grosskopf
patent: 0552953 (1993-07-01), None
patent: 9110170 (1991-07-01), None
“New Multi-EB Direct Write Concept for Maskless High Throughput”, Canon SubMicron Focus, vol. 5, Summer 2000.
Sandstrom and Odselius, “Large-Area High Quality Photomasks”, Micronic Laser Systems, published by SPIE, vol. 2621, 1985, pp. 312-318.
Singh-Gasson, Sangeet et al., Maskless Fabrication of Light-Directed Oligonucleotide Microarrays Using a Digital Micromirror Array, vol. 17, No. 10, Oct. 1999, pp. 974-978.
Devitt, Terry, “Advanced May Put Gene Chip Technology on Scientists Desktops”, http://www.biotech.wise.edu/Education/biotechnews/GeneChip.html, Oct. 7, 1999.
Chan Kin Foong
Mei Wenhui
Sim Dong Youn
Ball Semiconductor Inc.
Haynes and Boone LLP
Hindi Omar
Mack Ricky
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