Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1996-11-27
2000-02-15
Font, Frank G.
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359291, 359224, 359846, 359900, G02F 103
Patent
active
060259515
ABSTRACT:
The invention relates to spatial light modulators (SLM) for amplitude and phase modulation of incident light. A "flexure" hinge which is provided between the SLM's substrate and micromirror comprises integral hinged sections which allow for the micromirror to tilt or to move in a piston-like fashion relative to the substrate in response to an electrostatic force. The hinge is particularly advantageous for large mirrors. In addition, the hinge can provide improved heat sinking capability over previously reported SLM hinge designs based on torsion bars and cantilever beams. The flexure hinge has sufficient mechanical flexibility that the SLM actuation voltage required is not excessively high. The flexure hinge has many applications, the preferred ones being a SLM for modulating high-energy beams and a SLM for optical channel switching.
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Jerominek Hubert
Swart Nicholas R.
Bednarek Michael D.
Font Frank G.
National Optics Institute
Ratiff Reginald A.
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