Light modulating device and exposure apparatus using the same

Details Light modulating device and exposure apparatus using the same Light modulating device and exposure apparatus using the same

2005-10-11

2005-10-11

Ward, John Anthony (Department: 2875)

Illumination

Light source and modifier

Plural serial lens elements or components

C362S317000, C362S253000, C353S101000, C349S095000

Reexamination Certificate

active

06953268

ABSTRACT:
A light modulating device comprising a plurality of light modulating elements modulating the light that is incident thereto and emitting the light, wherein each of the light modulating elements is formed from a micro electronic machinery which is two-dimensionally arranged, and the transmittance can be controlled so as to vary for each of the light modulating elements. The light modulating device further comprises a lens array on a light-incident side of the light modulating elements, and the lens array condenses the incident light, which impinges on each of the light modulating elements, into a region whose area is smaller than an area occupied by each of the light modulating elements at a light-incident side thereof. Consequently, the light modulating device, in which usability of the light is improved and resolution is increased in the projection exposure, and the exposure apparatus using the same can be obtained.

REFERENCES:
patent: 5764318 (1998-06-01), Kurematsu et al.
patent: 6606135 (2003-08-01), Nakanishi et al.
patent: 6631039 (2003-10-01), Fujimori et al.
patent: 2001/0015778 (2001-08-01), Murade et al.
patent: 2001-521672 (2001-06-01), None
patent: WO 98/47042 (1998-10-01), None

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