Light irradiator

Details Light irradiator Light irradiator

2006-12-26

2006-12-26

Mai, Huy (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

C359S629000, C359S633000

Reexamination Certificate

active

07154673

ABSTRACT:
A light illuminating apparatus used for a laser annealing apparatus includes a first light splitting unit (16) and a second light splitting unit (20) for splitting a sole laser beam into n laser beams, and a synthesis unit (21) for synthesizing an m'th laser beam, radiated from the first light splitting unit (16), and an m'th laser beam radiated from the second light splitting unit (20), to each other, where m is an integer not less than 1 and not larger than n. The first light splitting unit (16) and the second light splitting unit (20) are formed by the same optical components and are arrayed inverted with respect to each other.

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