Light irradiation type thermal processing apparatus

Details Light irradiation type thermal processing apparatus Light irradiation type thermal processing apparatus

2005-02-15

2005-02-15

Fuqua, Shawntina (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C392S418000, C219S390000, C219S405000, C219S411000

Reexamination Certificate

active

06856762

ABSTRACT:
In a light diffuser, a strong light diffusion processing is performed to a lamp corresponding part located in a vertical immediate downward direction of each of a plurality of flash lamps, and a weak light diffusion processing is performed to an inter-lamp corresponding part located between lamp corresponding parts adjacent to each other. Thereby, the light transmittance of the lamp corresponding part is lower than that of the inter-lamp corresponding part. Light that is emitted from each of the flash lamps and directed to a vertical immediate downward direction is diffused intensely, while reducing the degree of light diffusion at a location immediately below space between the adjacent flash lamps, thereby improving in-plane uniformity of illumination distribution on a semiconductor wafer. This enables to provide a thermal processing apparatus capable of improving in-plane uniformity of illumination distribution on a substrate.

REFERENCES:
patent: 4571486 (1986-02-01), Arai et al.
patent: 4649261 (1987-03-01), Sheets
patent: 6437290 (2002-08-01), Shao et al.
patent: 57-162340 (1982-10-01), None
patent: 59-169125 (1984-09-01), None
patent: 60-258928 (1985-12-01), None
patent: 63-166219 (1988-07-01), None
patent: 2001-237195 (2001-08-01), None
patent: 2002-110579 (2002-04-01), None
patent: 2002-110580 (2002-04-01), None
English translation of Abstract for Japanese Patent Application Laid Open No. 2002-110579.
English translation of Abstract for Japanese Patent Application Laid Open No. 2002-110580.
English translation of Abstract for Japanese Patent Application Laid Open No. 2001-237195.
English translation of Abstract for Japanese Patent Application Laid Open No. 57-162340.
English translation of Abstract for Japanese Patent Application Laid Open No. 63-166219.
Japanese Patent Application Laid Open No. 59-169125 which corresponds to U.S. Patent No. 4,571,486 (as listed above).
Japanese Patent Application Laid Open No. 60-258928 which corresponds to U.S. Patent No. 4,649,261 (as listed above).

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