Light irradiation heat treatment method and light...

Details Light irradiation heat treatment method and light... Light irradiation heat treatment method and light...

2006-09-05

2006-09-05

Fuqua, Shawntina (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C392S418000, C219S385000, C219S405000, C219S411000, C118S724000, C118S725000, C118S501000

Reexamination Certificate

active

07103271

ABSTRACT:
A light irradiation heat treatment apparatus and method may use a plane-shaped light irradiation heating component, facing one surface of a workpiece supported in a furnace, to raise the temperature of the workpiece. The temperature of the workpiece is raised by setting an intensity distribution for light irradiated from the light irradiation heating component in accordance with the resistivity of the workpiece. Thereafter, the workpiece is irradiated with light having the set light intensity distribution to raise its temperature.

REFERENCES:
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patent: 5715361 (1998-02-01), Moslehi
patent: 6001175 (1999-12-01), Maruyama et al.
patent: 6284048 (2001-09-01), Van Bilsen et al.
patent: 6309458 (2001-10-01), Habuka et al.
patent: 6393210 (2002-05-01), Wu
patent: 6771895 (2004-08-01), Gat et al.
patent: 11214323 (1999-08-01), None

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