Optics: measuring and testing – By light interference – Holography
Reexamination Certificate
2006-12-05
2006-12-05
Toatley, Jr., Gregory J (Department: 2877)
Optics: measuring and testing
By light interference
Holography
C356S512000
Reexamination Certificate
active
07145659
ABSTRACT:
The present invention makes it possible to reliably hold a computer-generated hologram17and a sample surface18ain ideal design positions and to perform interference measurements on the surface shape of the sample surface18aby holding the computer-generated hologram17in a predetermined attitude by using a retaining member, and interposing a spacer45between this retaining member and the object so that relative positioning of both the computer-generated hologram17and the sample surface18ais performed. Light transmission type targets used for alignment are respectively disposed on the four corners of the frame body of the CGH17and the four corners of the measurement mirror18, and the system is devised so that images of these targets can be obtained by an image focusing lens43and CCD camera44, thus making it possible to check the adjustment of the alignment of the CGH17and sample surface18a.
REFERENCES:
patent: 5039223 (1991-08-01), Gemma et al.
patent: 5424828 (1995-06-01), Minami
patent: 6885460 (2005-04-01), Morita
patent: 8-110214 (1996-04-01), None
Matsuda Shin-ichi
Yasuda Kenji
Fujinon Corporation
Lyons Michael A.
Snider Ronald R.
Snider & Associates
Toatley Jr. Gregory J
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