Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Patent
1994-04-08
1995-07-04
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
G01N 2188
Patent
active
054303052
ABSTRACT:
An apparatus and method are described for analyzing an integrated circuit (IC), The invention uses a focused light beam that is scanned over a surface of the IC to generate a light-induced voltage alteration (LIVA) signal for analysis of the IC, The LIVA signal may be used to generate an image of the IC showing the location of any defects in the IC; and it may be further used to image and control the logic states of the IC. The invention has uses for IC failure analysis, for the development of ICs, for production-line inspection of ICs, and for qualification of ICs.
REFERENCES:
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Cole, Jr. Edward I.
Soden Jerry M.
Cone Gregory A.
Hohimer John P.
Nelms David C.
Steady Jacqueline M.
The United States of America as represented by the United States
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