Light induced production of ultrafine powders comprising metal s

Details Light induced production of ultrafine powders comprising metal s Light induced production of ultrafine powders comprising metal s

1985-08-15

1988-10-11

Miller, Edward A.

Chemistry: electrical and wave energy

Processes and products

Processes of treating materials by wave energy

423344, 501 96, C01B 3306

Patent

active

047769378

ABSTRACT:
A method of producing ultrafine powders comprising metal silicide powder and the products produced by the method are disclosed. The ultrafine powders comprising metal silicide powders are ideally suited to form stable colloidal suspensions which are used in the production of conductive metal silicide containing films. The process employs gaseous reactants comprising a metal halide and a silicon-containing compound. The reactants are exposed to high intensity light to produce ultrafine powders. In addition to the production of metal silicide powders, the ultrafine powders may also include silicon powder and metal subhalide powder. The ultrafine powders are particularly suited for use in VLSI and VVLSI production.

REFERENCES:
patent: 3253886 (1966-05-01), Lamprey et al.
patent: 3979500 (1976-09-01), Sheppard et al.

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