Light induced production of ultrafine powders comprising metal s

Details Light induced production of ultrafine powders comprising metal s Light induced production of ultrafine powders comprising metal s

1984-05-14

1985-12-10

Williams, Howard S.

Compositions: ceramic

Ceramic compositions

Refractory

204164, 2041571R, 423344, B01J 1912, C01B 3306, C04H 3558

Patent

active

045580170

ABSTRACT:
A method of producing ultrafine powders comprising metal silicide powder and the products produced by the method are disclosed. The ultrafine powders comprising metal silicide powders are ideally suited to form stable colloidal suspensions which are used in the production of conductive metal silicide containing films. The process employs gaseous reactants comprising a metal halide and a silicon-containing compound. The reactants are exposed to high intensity light to produce ultrafine powders. In addition to the production of metal silicide powders, the ultrafine powders may also include silicon powder and metal subhalide powder. The ultrafine powders are particularly suited for use in VLSI and VVLSI production.

REFERENCES:
patent: 3138468 (1964-06-01), Matkovich et al.
patent: 4022872 (1977-05-01), Carson et al.
patent: 4343687 (1982-08-01), Ronn
Murarka, Refractory Silicides for VSLI Production, Academic Press, 1983, pp. 115-131.
Danforth et al., Synthesis of Ceramic Powders by Laser Driven Reactions, Industrial Liaison Program Report, No. 10-17-82, ILP Publications Office, MIT, Cambridge, MA.
Nancy Stauffer, the Industrial Liaison Program of the Massachusetts Institute of Technology, Jul./Aug. 1984, vol. XII, No. 7, "Reports on Research", pp. 1 and 2.

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