Light heating apparatus and method therefor

Details Light heating apparatus and method therefor Light heating apparatus and method therefor

2005-01-11

2005-01-11

Fuqua, Shawntina (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C392S418000, C219S390000, C219S405000, C219S411000, C118S724000, C118S725000, C118S050100

Reexamination Certificate

active

06842582

ABSTRACT:
In a light heating apparatus having a flash lamp in which noble gas is enclosed, a casing surrounding the flash lamp, a stage where a silicon wafer on which light from the flash lamp is emitted is placed, and a power feeding apparatus for controlling light emission of the flash lamp, B/A is greater than 1.0 wherein integrated radiant intensity in a range from 220 to 370 nm wavelength is represented as A and integrated radiant intensity in a range from 370 to 800 nm wavelength.

REFERENCES:
patent: 5073698 (1991-12-01), Stultz
patent: 6614005 (2003-09-01), Walk et al.

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